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双语推荐：微机械

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微机械陀螺仪是陀螺技术和微电子机械系统（MEMS）技术结合产生的新一代惯性器件。根据其工作原理和采用材料的不同，微机械陀螺可分为硅基微机械振动陀螺（Si—MVGs）、微机械压电振动陀螺（PVGs）和悬浮转子式微机械陀螺等。该文介绍了微机械陀螺仪的主要参数指标和应用，对硅基微机械振动陀螺（Si—MVGs）、微机械压电振动陀螺（PVGs）和悬浮转子式微机械陀螺的最新研究进展作了综合性报道，讨论了微机械陀螺未来的发展趋势。
The micromachined gyroscopes are a new generation inertial devices which combined the gyro technol-ogies and MEMS technology.Based on the different operating principles and materials,micromachined gyroscopes can be mainly categorized into Si-based micromachined vibrating gyroscopes (Si-MVGs),micromachined piezoelectric vibrating gyroscopes(PVGs),micromachined gyroscopes with levitated rotor etc.The main parameters and applica-tions of the micromachined vibrating gyroscopes are introduced in this paper.The current developments of the vari-ous micromachined gyroscopes have been overviewed and the future trends of micromachined gyroscopes are also dis-cussed.

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为了解决机械臂开环控制精度低的问题,设计了一套基于STM32微控制器的机械臂反馈控制系统。通过QT图形界面将控制数据输入上位机,控制数据经串口传输到微控制器后驱动机械臂运动;由加速度传感器和磁通传感器组成的惯性传感器节点采集机械臂运动数据传回微控制器,采用由多个相关的参数可变PID控制器构成的控制器组对机械臂各个部位进行反馈控制。测试结果表明,利用惯性传感器实现的改进型PID的反馈控制系统比无反馈控制系统精度有较大提高,可用于实现更高精度的机械臂控制。
The open loop mechanical arm control system has low accuracy, so a feedback control system on the STM32 for the mechanical arm is designed and implemented in this paper. The data of arm control is entered with QT graphic interfaces and transmitted to the embedded system through serial port to drive the steering engine. The system uses sensor nodes , which contain accelerometer, gyroscope and magnetic sensor, to collect motion data of the arm and transmit to the embedded system. An improved PID controller system with variable parameters is used to control different parts of the mechanical arm. The experimental tests show that the control accuracy of the feedback control system is significantly improved compared with the open loop system.

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微沟道传热技术是当前国际传热领域研究的前沿，在大功率半导体激光器列阵、大型计算机芯片冷却等领域具有广泛的应用前景。为了克服有成熟加工技术的硅微沟道导热系数不高的缺陷，解决普通铜沟道机械加工技术中加工切向应力对沟道壁的破坏无法获得小于300μm的沟道壁以及机械加工后毛刺对制冷流体工质阻力极大的问题，对导热系数更高的铜微沟道的沟道加工工艺进行了研究。利用机械雕刻和化学腐蚀相结合的方法，获得一种简单的机械-化学二次加工工艺，实现了对铜微沟道的精密加工，满足微沟道壁薄、沟道光滑的技术要求，且价格便宜、制作工艺简单。
The micro-channel heat conduction was the leading edge of international transfer heat search field.There are good prospects cooling for high power diode laser array&large computer CPU and so on.In order to overcome the drawback,poor material conductivity of silicon micro-channel in which processing technologies are well established,this paper has searched for a new processing tech-nical to manufacture high conductivity copper micro-channel.The purpose was solving the problem that mechanical stress caused damage to the wall of micro-channel so that less than 300μm channel could not be made in common machine and the burr by handling would block up the channel.We uti-lized union mechanical-sculpture &chemical-etch method to obtain a simple machine-chemistry cou-ple processing technique to make accurate copper micro-channel which satisfy the technical require-ment of channel’s wall thin and smooth.Furthermore,the price is inexpensive,and manufacturing is easy.

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基于仿人机器人机械臂的高度实时性和极强的抗干扰性的特点,设计出了基于CAN现场总线仿人机器人机械臂分布式控制系统,利用C8051F041微控制器作为关节分布式控制器,并设计增量码盘和速度检测电路以及相应的软件等,完成了仿人机器人机械臂6个自由度的设计,对机械臂运动轨迹的控制达到了可靠性、实时性和稳定性的要求.
In order to improve the control performance over the mechanical arms of humanoid robot , a dis-tributed controller system for mechanical arms based on RS 485 bus was developed , to which joint controller TMS320F240DSP was applied.The circuits of incremental discs and speed detection as well as their applications were designed .The achievement of develop and design on distributed controllers for six degrees of freedom me-chanical arms fulfilled the trajectory requirement of humanoid robot qualification and the system .

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提出一种新的基于自适应平方根UKF的微机械传感器组合姿态测量系统.该系统采用3轴微机械陀螺积分得到姿态角，采用3轴微机械加速度计测量重力矢量得到俯仰角和横滚角，分别校正俯仰漂移和横滚陀螺漂移；采用磁强计得到航向角，并与陀螺积分角度融合校正航向陀螺漂移.跑车实验结果表明，基于自适应平方根UKF算法可实时估计机动加速度干扰，并在融合滤波器中进行补偿，能够有效去除车辆机动加速度干扰，姿态角估计精度在±0.6°以内.
To solve the attitude estimation problems for land vehicle use,we proposed a new low-cost attitude estimation system based on the adaptive unscented Kalman filter (UKF). The system is composed of three MEMS gyroscopes,three accelerometers and magnetometers. The angles were derived by the integration of gyros and the gyro biases were calibrated by accelerometers and magnetometers. To remove the disturbance caused by maneuver accelerations,we proposed a new robust adaptive algorithm to estimate the accelerations in real-time and compensate the disturbance in the accelerometers due to the maneuvering. Experiment results show that the proposed adaptive UKF effectively estimate the attitude and insulate the influence caused by the maneuvering accelerations,and the three angle errors are within ±0.6°.

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为抑制在微机械陀螺中广泛存在的共模干扰问题,提出一种新型振动微机械陀螺结构设计.陀螺结构采用对称设计,将二自由度振荡系统同时引入到驱动模态和敏感模态中.通过在两个驱动质量块上施加反相位驱动力使驱动模态下质量块始终反向振动.通过左右两个完全相同的框架结构设计,最大限度消除外界振动导致的共模干扰.为消除多自由度驱动模态和敏感模态的耦合,将驱动方向的弹性悬梁引入敏感模态,使微机械陀螺具备双解耦结构.设计出的微机械陀螺,敏感模态增益较驱动模态提高约30 dB.驱动模态和敏感模态的带宽分别为250 Hz和310 Hz.在操作频率区域内可以提供稳定的增益和相位.并且达到有效消除共模干扰的目的.
To eliminate the common mode input in the the micromachined gyroscopes, a novel architecture of the micromachined gyroscope is proposed in this paper. The structure of the MEMS is designed to be symmetrical, and two-degree of freedom ( DOF) oscillators are utilized in both drive-mode and sense-mode. Driving force actuates two driving masses to move with anti-phase in drive-mode. The novel architecture consists of identical left and right tines, which provides immunity to common mode input of environmental variations. To avoid the coupling between drive-mode and sense-mode, the drive-mode suspensions are introduced in sense-mode. The gyroscope is designed to be double-decoupled structure. Compared to the drive-mode of the proposed gyroscope, the gain of frequency response is increased by about 30 dB in the sense-mode. The bandwidth of drive-mode and sense-mode are 250 Hz and 310 Hz respectively. The gyroscope can provide stable gain and phase in the operational frequency regio

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为了提高微晶玻璃化学机械抛光（CMP）的材料去除速率（MRR），降低其表面粗糙度，利用自制的抛光液对微晶玻璃进行化学机械抛光，研究了4种含不同磨料（ SiO2、Al2 O3、Fe2 O3、CeO2）的抛光液对微晶玻璃化学机械抛光MRR和表面粗糙度的影响．利用纳米粒度仪检测抛光液中磨料的粒径分布和Zeta电位，利用原子力显微镜观察微晶玻璃抛光前后的表面形貌．实验结果表明，在相同条件下，采用CeO2作为磨料进行化学机械抛光时可以获得最好的表面质量，抛光后材料的表面粗糙度Ra ＝0．4 nm， MRR＝100．4 nm／min．进一步研究了抛光液中不同质量分数的CeO2磨料对微晶玻璃化学机械抛光的影响，结果表明，当抛光液中CeO2质量分数为7％时，最高MRR达到185 nm／min，表面粗糙度Ra ＝1．9 nm；而当抛光液中CeO2质量分数为5％时， MRR＝100．4 nm／min，表面粗糙度最低Ra ＝0．4 nm．CeO2磨料抛光后的微晶玻璃能获得较低表面粗糙度和较高MRR．
In order to increase the material removal rate ( MRR) and decrease the surface roughness of glass-ceramics in chemical mechanical polishing (CMP), experiments were conducted on glass-ceramic substrates by using home-made slurries , and the effect of different abrasives ( SiO2 , Al2 O3 , Fe2 O3 , CeO2 ) on the MRR and surface roughness of glass-ceramics in CMP was investigated .The size distribu-tion and Zeta potential of the different abrasive particles were characterized by Mastersizer .The surface roughness of the glass-ceramic substrates before and after being polished by different abrasives was meas-ured by atomic force microscope ( AFM ) .Results show that under the same conditions , the surface roughness Ra of the glass-ceramic substrate is 0.4 nm and the MRR is 100.4 nm/min when CeO2 was abrasive in the slurry .Then the effect of CeO 2 mass fraction on CMP of glass-ceramics was studied .It was found that when the mass fraction of CeO2 is 7%, the MRR of glass-ceramic su

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为增大静电驱动二维微扫描镜的机械转角,基于非线性动力学理论研究了不同梳齿结构对其振幅的影响,理论上得到发散型梳齿分布相较于平行型梳齿分布具有更大的机械转角。此外,采用绝缘体上硅(SOI)加工工艺设计并制作了这两种结构的微扫描镜,并对其相关特性进行了测试。测试结果表明:在相同的驱动电压下,发散型结构始终都比平行型结构具有更大的机械转角,与仿真结果基本一致;当加载驱动电压为42 V的方波信号时,发散型结构扫描镜的可动框架和镜面的最大机械转角可以达到12.3°、13.49°,而平行型结构扫描镜的可动框架和镜面的最大机械转角则为10.25°、11.68°。
In order to increase the deflection, the effect of comb structure on the twisting amplitude for two-dimensional(2D)microscanner is researched on basis of the nonlinear dynamics theory in this paper,and it can be obtained that the effect of the divergent distribution is superior to parallel distribution. Besides, the samples are fabricated based on silicon-on-insulator(SOI)technology,and then the electromechanical characteristic is tested. The test results demonstrate the microscanner with divergent comb distribution has greater twisting amplitude,which agrees with the theoretical analysis. The microscanner with divergent distribution could generate maximum twisting angles of 12. 3° and 13. 49° under the square wave of 42 V, while the sample with parallel distribution could generate maximum twisting angles of 10. 25° and 11. 68° under the same square wave.

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为了研究电气开关电接点的机械抖动次数，特别是为了测量电接点的机械抖动次数，研制了基于微控制器的机械抖动次数测量系统。论述了测量系统的硬件设计和软件设计，给出了电路原理图和程序流程框图，以及关键程序源代码。对轻触按钮开关、复式按钮开关、单刀双掷开关的机械抖动次数进行了测量，测量结果表明：机械抖动次数是随机数，为0～11；对于复式按钮开关而言，前沿抖动次数一般小于后沿抖动次数；对单刀双掷开关而言，前沿抖动次数明显大于后沿抖动次数；人们在操作按钮开关时，要迅速果断且用力要恰当，这样有助于减小机械抖动次数。
In order to study the mechanical dithering number of electric switch contact, especial for measuring the mechanical dithering number of electric contact, a measurement system of the mechanical dithering number was de-signed based on MCU.This paper discussed the hardware design and software design of the measurement system, and provided circuit diagram and flow chart of program, as well as the key source code.For nudging button, com-pound button and SPDT switch, the mechanical dithering number was measured.The measurement results show that: the number of mechanical dither is random digit, it is 0 to 11; for compound button, front edge dithering number is usually less than back edge dithering number;for SPDT switch, front edge dithering number is obviously greater than back edge dithering number.When pressing the button switch, we need to operate it quickly and deci-sively and force it appropriately, which helps to reduce the mechanical dithering number.

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尽管激光钻孔在印制板(PCB)钻孔中应用得越来越广,但是利用微型钻头在机械钻机上进行的机械钻孔仍然是最重要的PCB钻孔方式。顺应PCB微孔的发展趋势,微型钻头直径越来越小,新型钻头结构不断出现,微钻头性能不断提高,微钻头涂层技术逐步成熟,微孔钻削的研究不断深入,推动着PCB技术的发展。本文即对微钻头及微孔钻削的进展进行总结,对微钻头和微孔钻削的趋势进行展望。
Although laser drilling plays more and more important role in PCB microvia drilling, mechanical drilling by using micro drill bit on drilling machine still dominates the PCB micro hole drilling methods. With the development trend of PCB micro hole, the micro drill bit becomes smaller and smaller, the performances of micro drill bit becomes better and better, coated micro drill bits becomes more and more popular and the comprehensive studies of micro hole drilling are reported. These developments are reviewed in this paper and the development trend of micro drill bit and micro drilling are pointed.

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